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Synthesis of Tantalum and Niobium Based Nitride and Oxy Nitride Films in Plasma Environment

Synthesis of Tantalum and Niobium Based Nitride and Oxy Nitride Films in Plasma Environment

Siddiqui, Jamil Ahmad
URI: http://142.54.178.187:9060/xmlui/handle/123456789/10732
Date: 2017

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