A. Raza; S. Khushnood; A. M. Malik
(Taxila: University of Engineering and Technology, Taxila, 2016-02-08)
Abstract-A comb drive is an important component of MEMS-based actuators used in many applications such as a dispenser and a fluidic pump, and as a sensor in an accelerometer and in MEMS gyroscope. These energy systems, ...