Abstract:
In this research, effect of copper(Cu)doping on the structural, optical, morphological and electricalcharacteristics of diamond like carbon(DLC)thinfilms have been investigated. Thinfilms of DLC andCu doped DLC(Cu-DLC)have been deposited on glass substrates by pulsed Laser Deposition(PLD)technique. XRD results showed that at 1.5% of Cu doping, Cu form cluster in DLC. Below of thisdoping ratio, Cu has amorphous form in DLC. AFM reveals that the minimum surface roughness wasobserved for the 1.0% DLC thinfilm with the root mean square surface roughness(Rrms)of 2.07. TheRrmsvalues for the 1.5%, 2.0% and 2.5% Cu-DLC thinfilms are 2.45, 3.14 and 3.89 respectively. Theaverage sheet resistivity offilms is decreased by increasing the Cu concentration, according to FourPoint Probe technique
